Maintenance & Refurbishment
We focuse on providing complete and efficient cleaning and surface treatment services for advanced process kits.

We have extensive experience in the repair and refurbishment of high value products such as chucks, heaters, windows, bellhouses, end effectors, vacuum pumps, etc. Through our perfect process equipment and team, strict supervision team, from materials to application areas, to ensure that the property of customers is protected.

Condensate pump components

Condenser Refurbishment

VAT Valve Maintenance

MKS Valve Refurbishment

MKS Valve Refurbishment

Heater Refurbishment

VAT Valve Refurbishment

Heating Element

Condensation Filter

Vacuum Pump Repair and Refurbishment

Vacuum line Refurbishment

Heater Maintenance

Heater
Welcome to contact us for detailed application solutions and technical parameters
